Manufacturing a Microstructure Apparatus
Prof.-Dr. Diem, Dr. Schubert, Dr. Fichtner
The method involves producing a microstructure apparatus consisting of individual layers of foils arranged one upon the other and tightly connected together with microstructure elements. The foils are made from deformable plates with pre-structuring by stretching to produce the microstructure elements. An independent claim is also included for a microstructure apparatus.