Microstructured Body Gradual Construction Process and thus Produced Microstructured Bodies

Dr. Schubert, Mrs. Neumann, Dr. Bier, Mr. Kapitza


A process is disclosed for gradually constructing microstructured bodies by lithographic methods, as well as thus produced microstructured bodies. Radiation-sensitive layers are stacked up to a certain height, each layer is irradiated through a structured mask after being deposited on the stack, and the irradiated areas of the layers are removed by a developer solution. After each layer is irradiated, their total free surface is metallised, except for the free surface of the last applied layer. The radiation-sensitive layer accessible to the developer solution is then developed, and the metallic layer on the surface of the underlying radiation-sensitive layer partially exposed by the development process is etched away.